Abstract:Nitrogen ions were implanted into SiC ceramics by using ion implantation technology (N+-SiC). The surface structure and chemical bonds of N+-SiC ceramics were determined by X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS), and their nanohardness was measured by nanoindenter. The friction and wear properties of the N+-SiC/SiC tribo-pairs were investigated and compared with those of SiC/SiC tribo-pairs in water using ball-on-disk tribo-meters. The wear tracks on the N+-SiC ceramics were observed by non-contact surface profilometer and scanning electron microscope (SEM) and their wear volumes were determined by non-contact surface profilometer. The results show that the N+-SiC ceramics were mainly composed of SiC and SiCN phase and Sisingle bondN, Csingle bondC, Cdouble bondN and Csingle bondN bonds were formed in the implantation layer. The highest hardness of 22.3 GPa was obtained as the N+-SiC ceramics implanted at 50 keV and 1 × 1017 ions/cm2. With an increase in nitrogen ion fluence, the running-in period of N+-SiC/SiC tribo-pairs decreased, and the mean stable friction coefficient decreased from 0.049 to 0.024. The N+-SiC ceramics implanted at 50 keV and 5 × 1017 ions/cm2 exhibited the excellent tribological properties in water. In comparison of SiC/SiC ceramic tribo-pairs, the lower friction coefficient and lower wear rate for the N+-SiC/SiC tribo-pairs were acquired.

全文下载：Influence of nitrogen ion implantation fluences on surface structure and tribological properties of SiC ceramics in water-lubrication.pdf