The multiphase microabrasive jet machining is a new type of surface texturing technique using compressed air to accelerate the mixtures of abrasive and water to remove material. It is effective for surface texturing on different materials, and can also reduce the pollution and cost by recycling the microabrasive particles easily. Basing on this technique and using the micro synthetic diamond as the abrasive, a multiphase jet technique is developed for machining on silicon carbide (SiC) surfaces. The processing results are compared to other abrasives, and influences of the processing parameters such as jet distance, jet pressure, abrasive concentration, particle size, and jet angle are investigated experimentally. The improvement on machining quality and efficiency are confirmed.

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